A Fabrication Method for Integrating Electrodes in Nanofluidic Channels
نویسندگان
چکیده
Nanofluidic channels are unique bioanalytical tools that can separate, detect, analyze and concentrate biomolecules. Embedding electodes in such systems increases the functionality by allowing for unique flow control, label-free sensing, and concentration enhancement. In this work, we describe the fabrication process of nanofluidic channels with integrated electrodes, as well as the characterization of such channels. The key aspects of our surface-micromachined process is the use of a side-release etch to overcome diffusion limited etching of long thin channels, and a low-temperature process (<300 C), to allow for for the integration of addressable electrodes for a variety of bioanalytical applications.
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